刘泽文本科毕业于中国科学技术大学，法国巴黎萨克雷大学（原巴黎第十一大学）理学博士，清华大学博士后。1997年入职清华大学微电子学研究所（现集成电路学院前身）。历任清华大学微电子所微纳器件与系统研究室副主任，微电子学研究所副所长等职。他参加或者主持过多项国家和地方政府研究项目包括973项目、重点研发项目、自然科学基金项目。在Nano Letter、APL、EDL、Nanotechnology等国内外各类学术期刊和会议上发表学术论文共200多篇，拥有发明专利100多项。主持翻译学术专著一本《Microsystem Design》，在英文学术专著上撰写章节两篇。他多次受邀请担任国家自然科学基金, 国家重大专项和国家科学技术奖励办评审专家以及项目咨询专家。作为骨干参加人获得中科院科技进步特等奖一项，两次获得ECS国际会议优秀论文奖，一次中国电子学会优秀论文奖。获得过清华大学优秀教师、清华大学优秀博士生导师，苏州姑苏领军人才等称号。是多个国际期刊JMEMS、EDL、Nanotechnology的审稿人。他目前的主要研究方向是集成电路工艺、微纳制造及MEMS智能传感器系统。主要具体研究领域包括：光刻技术、射频MEMS器件、纳米孔制作及其在微流体及生物测量中的应用、宽禁带半导体智能传感器及人工智能在传感器工程中的应用。

刘泽文教授多次赴荷兰TU-Delft大学、芬兰OULU大学和法国巴黎皮埃尔和居里大学、巴黎第十三大学讲学或学术交流。2015-2019年间多次主持中荷国际半导体技术人才论坛暨暑期研修班，与荷兰TU-Delft大学Said教授一起担任共主席。

刘泽文积极参与学术相关社会兼职工作，兼任过全国半导体设备和材料标准化技术委员会微光刻分技术委员会委员；全国微机电技术标准化委员会射频MEMS器件与系统标准化工作组专家；欧美同学会留法比分会秘书长、副会长等。多次担任“全国大学生集成电路创新创业大赛”、中国研究生创“芯”大赛评审专家。

他讲授过的主要课程有：《集成智能传感器》、《微纳技术加工原理》、《传感器在现代社会生活中的应用》。

附： 近五年学术论文一览表

2025

1. HONG Hao, LEI Xin, WEI Jiangtao, et al. Investigation on Fabrication of Silicon Nanopores Using an Electrochemical Passivation Etch-Stop Strategy [J]. Microsystems & Nanoengineering, 2025.

2. LEI Xin, ZHANG Jiayan, HONG Hao, et al. Ultrahigh-Performance Osmotic Power Generation in Gate-Controlled Nanopores [J]. Advanced Functional Materials, 2025.

3. WEI Jiangtao, LIU Zewen. In Situ Active Thermoelectric Cooling for RF MEMS Switch Creep Mitigation [J]. Journal of Micromechanics and Microengineering, 2025.

4. ZHAN Teng, SUN Jianwen, LIN Jin, et al. Nanowatt-level Optoelectronic GaN-based Heterostructure Artificial Synaptic Device for Associative Learning and Neuromorphic Computing [J]. Journal of Semiconductors, 2025.

5. YANG Chenyang, TANG Jingya, SUN Jianwen, et al. Ultrasensitive Detection of Mirna with Single-Nucleotide Resolution Using a High-Electron-mobility Transistor Biosensor Combined with Splint-Ligation [J]. Biosensors and Bioelectronics, 2025.

2024

6. YANG Chenyang, SUN Jianwen, ZHANG Yulong, et al. Construction of AlGaN/GaN High-Electron-mobility Transistor-Based Biosensor for Ultrasensitive Detection of SARS-CoV-2 Spike Proteins and Virions [J]. Biosensors and Bioelectronics, 2024, 257: 116304.

7. YE Minjie, SUN Jianwen, ZHAN Teng, et al. Investigation of High-Sensitivity Ph Sensor Based on Au-Gated AlGaN/GaN Heterostructure [J]. Applied Sciences-Basel, 2024, 14(5): 2126.

8. ZHANG Yulong, SUN Jianwen, LIU Huiliang, et al. Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes [J]. Journal of Microelectromechanical Systems, 2024, 33(3): 354-362.

9. WEI Jiangtao, HONG Hao, WANG Xing, et al. Nanopore-based Sensors for DNA Sequencing: a Review [J]. Nanoscale, 2024, 16: 11869-11887.

10. HONG Hao, LEI Xin, WEI Jiangtao, et al. Rectification in Ionic Field Effect Transistors Based on Single Crystal Silicon Nanopore [J]. Advanced Electronic Materials, 2024, 10(6): 2300631.

11. ZHANG Yulong, SUN Jianwen, LIU Huiliang, et al. DC Hot Switching Lifetime Study for Contact MEMS Switch by Weibull Distribution Analysis [C] // Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems. 2024: 797-800.

2023

12. ZHANG Yulong, SUN Jianwen, LIU Huiliang, et al. Generalized-Accumulated-Temperature Parameter for Characteristic Prediction of Metal-Based Mems Cantilever [C] // Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems. 2023: 680-683.

13. HONG Hao, WEI Jiangtao, LEI Xin, et al. Study on the Controllability of the Fabrication of Single-Crystal Silicon Nanopores/nanoslits with a Fast-Stop Ionic Current-Monitored TSWE Method [J]. Microsystems & Nanoengineering, 2023, 9: 92.

14. LEI Xin, ZHANG Jiayan, HONG Hao, et al. Controllable Fabrication and Rectification of Bipolar Nanofluid Diodes in Funnel-Shaped Si3N4 Nanopores [J]. Small, 2023, 19(52): 2304385.

15. ZHAN Teng, SUN Jianwen, FENG Tao, et al. Electrical Characteristics and Photodetection Mechanism of TiO2/AlGaN/GaN Heterostructure-Based Ultraviolet Detectors with a Schottky Junction [J]. Journal of Materials Chemistry C, 2023, 11(5): 1704-1713.

16. ZHAN Teng, SUN Jianwen, FENG Tao, et al. Correction: Electrical characteristics and photodetection mechanism of TiO2/AlGaN/GaN heterostructure-based ultraviolet detectors with a Schottky junction (vol 11, pg 1704, 2023) [J]. Journal of Materials Chemistry C, 2023, 11(24): 8298.

17. ZHANG Yulong, SUN Jianwen, LIU Huiliang, et al. Investigation of Thermal Creep in Metal-Based MEMS Cantilevers [J]. Journal of Microelectromechanical Systems, 2023, 32(4): 372-380.

2022

18. LI Yuning, SUN Jingye, LI Shasha, et al. THREE-DIMENSIONAL GRAPHENE FIELD EFFECT TRANSISTORS AS SELF-POWERED VIBRATION SENSORS [J]. Applied Physics Letters, 2022, 121(16): 163501.

19. ZHANG Yulong, LIU Huiliang, SUN Jianwen, et al. Scalable Contact-Capacitive MEMS Switches with High Capacitance Ratio for Millimeter-Wave Applications [J]. IEEE Access, 2022, 10: 81549-81558.

20. LI Yuning, LI Shasha, SUN Jingye, et al. Monolayer MoS2 Photodetectors with a Buried-Gate Field-Effect Transistor Structure [J]. Nanotechnology, 2022, 33(50): 505205.

21. ZHANG Yulong, SUN Jianwen, LIU Huiliang, et al. Modeling and Measurement of Thermal–Mechanical-Stress-Creep Effect for RF MEMS Switch Up to 200 °C [J]. Micromachines, 2022, 13(11): 2004.

22. ZHANG Yang, LI Yuning, YOU Qing, et al. A Broadband 3D Microtubular Photodetector Based on a Single Wall Carbon Nanotube-Graphene Heterojunction [J]. Nanoscale, 2022, 14(26): 9482-9491.

23. LEI Xin, ZHANG Jiayan, HONG Hao, et al. Controllable Shrinking Fabrication of Solid-State Nanopores [J]. Micromachines, 2022, 13(10): 1639.

24. SUN Jianwen, ZHAN Teng, SOKOLOVSKIJ Robert, et al. Enhanced Sensitivity Pt/AlGaN/GaN Heterostructure NO₂ Sensor Using a Two-Step Gate Recess Technique [J]. IEEE Sensors Journal, 2021, 21(20): 22389-22397.

2021

25. ZHANG Yulong, GONG Zhuhao, LIU Huiliang, et al. Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure [C] // 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). 2021: 1238-1241.

26. ZHANG Yulong, LIU Zewen, LIU Huiliang. An Ultra-Broadband Contact-Capacitive RF MEMS Switch for 15-110GHZ Applications [C] // 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). 2021: 275-278.

27. HONG Hao, YE Li, LI Ke, et al. Fabrication of Nanoslits with <111> Etching TSWE Method [C] // 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). 2021: 1152-1155.

28. 刘泽文, 徐娇, 张玉龙, 等. 基于MEMS电容式加速度计的闭环读出电路设计 [J]. 传感技术学报, 2021, 34(3): 297-303.

29. DENG Tao, ZHANG Zhaohao, ZHANG Yang, et al. Three-dimensional Graphene FETs for Ph Detection [C] // 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). 2021: 1192-1195.